Hoʻohana ʻia nā aniani ʻo Carmanhaas a i ʻole nā mea hoʻohālike holoʻokoʻa i loko o nā lua laser e like me nā mea hoʻohālikelike hope a me nā aniani fold, a ma waho e like me nā beam benders i nā ʻōnaehana hāʻawi beam.
ʻO Silicon ka mea hoʻohana pinepine ʻia i ke aniani substrate; ʻO kona pōmaikaʻi he haʻahaʻa kumu kūʻai, kūpaʻa maikaʻi, a me ka paʻa wela.
ʻO ke aniani Molybdenum ʻoi aku ka paʻakikī o ka ʻili i kūpono no nā kaiapuni kino koʻikoʻi. Hāʻawi ʻia ke aniani Mo i ka uhi ʻole.
| Nā kikoʻī | Nā kūlana |
| Ka hoomanawanui ana | +0.000” / -0.005” |
| Hoʻomanawanui mānoanoa | ±0.010” |
| Kūlikelike : (Plano) | ≤ 3 mau minuke arc |
| Mākaʻikaʻi ka puka (ʻoni ʻia) | 90% o ke anawaena |
| Kii Ili @ 0.63um | Mana: 2 la'i, 'A'ole pololei: 1 la'i |
| ʻEli-Eli | 10-5 |
| Inoa Huahana | Anawaena (mm) | ET (mm) | Ka uhi ʻana |
| Mo Mirror | 30 | 3/6 | ʻAʻohe uhi, AOI: 45° |
| 50.8 | 5.08 | ||
| Panini Silika | 30 | 3/4 | HR@106um, AOI:45° |
| 38.1 | 4/8 | ||
| 50.8 | 9.525 |
